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Plasma heating characterization of the large area inductively coupled plasma etchers with the plasma information for managing the mass production
by
Park, Seolhye
,
Park, Yoona
,
Seong, Jaegu
,
Lee, Haneul
,
Bae, Namjae
,
Roh, Ki-baek
,
Seo, Rabul
,
Song, Bongsub
,
Kim, Gon-Ho
Published in
Physics of plasmas
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Predictive control of the plasma processes in the OLED display mass production referring to the discontinuity qualifying PI-VM
by
Park, Seolhye
,
Jang, Yongsuk
,
Cha, Taewon
,
Noh, Yeongil
,
Choi, Younghoon
,
Lee, Juyoung
,
Seong, Jaegu
,
Kim, Byungsoo
,
Cho, Taeyoung
,
Park, Yoona
,
Seo, Rabul
,
Yang, Jae-Ho
,
Kim, Gon-Ho
Published in
Physics of plasmas
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Cause analysis of the faults in HARC etching processes by using the PI‐VM model for OLED display manufacturing
by
Park, Seolhye
,
Kyung, Yunyoung
,
Lee, Juyoung
,
Jang, Yongsuk
,
Cha, Taewon
,
Noh, Yeongil
,
Choi, Younghoon
,
Kim, Byungsoo
,
Cho, Taeyoung
,
Seo, Rabul
,
Yang, Jae‐Ho
,
Jang, Yunchang
,
Ryu, Sangwon
,
Kim, Gon‐Ho
Published in
Plasma processes and polymers
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Data-driven plasma science based plasma etching process design in OLED mass production referring to PI-VM
by
Park, Seolhye
,
Seong, Jaegu
,
Park, Yoona
,
Noh, Yeongil
,
Lee, Haneul
,
Bae, Namjae
,
Roh, Ki-Baek
,
Seo, Rabul
,
Song, Bongsub
,
Kim, Gon-Ho
Published in
Plasma physics and controlled fusion
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Physics Of Plasmas
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Plasma Physics And Controlled Fusion
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Plasma Processes And Polymers
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Physical Sciences
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Physics
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Physics, Fluids & Plasmas
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Science & Technology
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Ion Flux
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Mass Production
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Optical Emission Spectroscopy
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Organic Light Emitting Diodes
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Etching
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Inductively Coupled Plasma
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Plasma Etching
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Plasma Information
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Absorption
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Algorithms
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Arbeitsvorbereitung
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Aspect Ratio
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Cause Analysis
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Chambers
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Coupled Modes
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Coupling
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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Aip Digital Archive
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American Institute Of Physics
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Wiley-Blackwell Journals
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Aip Open Access Journals
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Institute Of Physics
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Wiley-Blackwell Read & Publish Collection
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Institute Of Physics Iopscience Extra
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