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DC sputtered iron-doped indium saving indium tin oxide thin films using Fe 3 O 4 target
by
Petrovska, Svitlana
,
Sergiienko, Rruslan
,
Nakamura, Takashi
,
Ohtsuka, Makoto
Published in
Molecular crystals and liquid crystals (Philadelphia, Pa. : 2003)
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DC sputtered iron-doped indium saving indium tin oxide thin films using Fe3O4 target
by
Petrovska, Svitlana
,
Sergiienko, Rruslan
,
Nakamura, Takashi
,
Ohtsuka, Makoto
Published in
Molecular Crystals and Liquid Crystals
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Journal Title
Molecular Crystals And Liquid Crystals
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Subjects
Argon-Oxygen Atmospheres
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1
Chemistry
1 results
1
Chemistry, Multidisciplinary
1 results
1
Crystallography
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1
Direct Current Sputtering
1 results
1
Electrical Properties
1 results
1
Flow Rates
1 results
1
Four Point Probe Method
1 results
1
Gas Flow
1 results
1
Heat Treatment
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1
Indium Oxides
1 results
1
Indium Tin Oxides
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1
Iron Oxides
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1
Iron-Doped Indium Tin Oxide
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Materials Science
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Materials Science, Multidisciplinary
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Optical Properties
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Physical Sciences
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Science & Technology
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Substrates
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Taylor And Francis Science And Technology Collection
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