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Low-temperature preparation of phosphorus doped μc-Si:H thin films by low-frequency inductively coupled plasma assisted chemical vapor deposition
by
Yan, W.S.
,
Wei, D.Y.
,
Guo, Y.N.
,
Xu, S.
,
Ong, T.M.
,
Sern, C.C.
Published in
Thin solid films
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Silicon homojunction solar cells via a hydrogen plasma etching process
by
Xiao, S Q
,
Xu, S
,
Zhou, H P
,
Wei, D Y
,
Huang, S Y
,
Xu, L X
,
Sern, C C
,
Guo, Y N
,
Khan, S
,
Xu, Y
Published in
Journal of physics. D, Applied physics
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Journal Of Physics. D, Applied Physics
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Thin Solid Films
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Chemical Vapor Deposition
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Composition And Phase Identification
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Discharges For Spectral Sources
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Electric Discharges
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Institute Of Physics:jisc Collections:iop Publishing Journal Archive 1874-1998 (Access Period 2020 To 2024)
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Institute Of Physics:jisc Collections:iop Publishing Read And Publish 2024-2025 (Reading List)
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Institute Of Physics Iopscience Extra
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