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SIMS characterization of thin layers of IR and its silicides
by
Blanco, JoséM.
,
Serrano, JoséJ.
,
Jiménez-Leube, Javier
,
Rodríguez, Tomás
,
Aguilar, Miguel
,
Gwilliam, Russel
Published in
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
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Nuclear Instruments & Methods In Physics Research. Section B, Beam Interactions With Materials And Atoms
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Sciencedirect Journals
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Sciencedirect Freedom Collection 2022-2024
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