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Fracture Toughness of Free-Standing ZrSi x Thin Films Measured Using Crack-on-a-Chip Method
by
Shafikov, Airat
,
van de Kruijs, Robbert
,
Benschop, Jos
,
van den Beld, Wesley
,
Houweling, Silvester
,
Bijkerk, Fred
Published in
Journal of microelectromechanical systems
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Fracture Toughness of Free-Standing ZrSix Thin Films Measured Using Crack-on-a-Chip Method
by
Shafikov, Airat
,
van de Kruijs, Robbert
,
Benschop, Jos
,
van den Beld, Wesley
,
Houweling, Silvester
,
Bijkerk, Fred
Published in
Journal of microelectromechanical systems
Get full text
Article
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Journal Of Microelectromechanical Systems
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Subjects
Actuation
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Actuators
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Buckling
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Cantilever Beams
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Crack Arrest
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Crack Initiation
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Crack Propagation
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Engineering
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Engineering, Electrical & Electronic
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Euv Pellicle
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Finite Element Method
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Fracture Toughness
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Free-Standing
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Heat Treating
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Instruments & Instrumentation
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Integrated Circuits
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Ion Beams
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Mathematical Models
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Mechanical Analysis
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