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Patterned LiNbO sub(3) thin film fabrication basing aqueous precursor and the study on pattern quality and film morphology
by
Wua, Meng
,
Yana, Wenbo
,
Jinga, Jianli
,
Wanga, Donghui
,
Shib, Lihong
,
Zhanga, Lixia
,
Wanga, Xun
,
Lia, Shaobei
,
Chena, Hongjian
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Journal of alloys and compounds
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Journal Of Alloys And Compounds
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Alloys
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Biomedical Materials
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Crystallization
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Morphology
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Photolithography
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Precursors
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Solubility
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Thin Films
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Elsevier Sciencedirect Journals
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Sciencedirect Freedom Collection 2022-2024
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