Search Results - Shimizu, Hank

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    Ultra-High Purity Hydrazine Delivery for Low Temperature Metal Nitride ALD

    Ultra-High Purity Hydrazine Delivery for Low Temperature Metal Nitride ALD by Alvarez, Daniel, Spiegelman, Jeffrey, Holmes, Russell, Andachi, Keisuke, Raynor, Mark, Shimizu, Hank

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    Enabling low temperature metal nitride ALD using ultra-high purity hydrazine: ET/ID: Enabling technologies and innovative devices

    Enabling low temperature metal nitride ALD using ultra-high purity hydrazine: ET/ID: Enabling technologies and innovative devices by Alvarez, Dan, Spiegelman, Jeffrey, Andachi, Keisuke, Holmes, Russell, Raynor, Mark, Shimizu, Hank

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