Search Results - Shirayone, Shigeru

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  1. 1
    Particle Transport in Etching Chamber Influenced by Coulomb Force

    Particle Transport in Etching Chamber Influenced by Coulomb Force by Ishiguro, Masaki, Ikenaga, Kazuyuki, Tamura, Tomoyuki, Shirayone, Shigeru, Nawata, Makoto, Sumiya, Masahiro

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  2. 2
    Theoretical Calculation of Photoabsorption of Various Polymers in an Extreme Ultraviolet Region

    Theoretical Calculation of Photoabsorption of Various Polymers in an Extreme Ultraviolet Region by Matsuzawa, Nobuyuki N., Oizumi, Hiroaki, Mori, Shigeyasu, Irie, Shigeo, Shirayone, Shigeru, Yano, Ei, Okazaki, Shinji, Ishitani, Akihiko, Dixon, David A.

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  3. 3
    Evaluation of the Outgassing from Resists at the EUV Wavelength

    Evaluation of the Outgassing from Resists at the EUV Wavelength by Irie, Shigeo, Oizumi, Hiroaki, Nishiyama, Iwao, Shirayone, Shigeru, Ryoo, Manhyoung, Yamanashi, Hiromasa, Yano, Ei, Okazaki, Shinji

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  4. 4
    Development of Resist Materials for EUVL

    Development of Resist Materials for EUVL by Irie, Shigeo, Shirayone, Shigeru, Mori, Shigeyasu, Oizumi, Hiroaki, Matsuzawa, Nobuyuki, Yano, Ei, Okazaki, Shinji, Watanabe, Takeo, Kinoshita, Hiroo

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  5. 5
    Imaging results for resist films exposed to EUV radiation

    Imaging results for resist films exposed to EUV radiation by Ryoo, Manhyoung, Shirayone, Shigeru, Yano, Ei, Okazaki, Shinji, Kang, Sujin

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  6. 6
    Illumination system design for a three-aspherical-mirror projection camera for extreme-ultraviolet lithography

    Illumination system design for a three-aspherical-mirror projection camera for extreme-ultraviolet lithography by Li, Y, Kinoshita, H, Watanabe, T, Irie, S, Shirayone, S, Okazaki, S

    Published in Applied optics (2004)
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  7. 7
    Prediction of resolution using wet-develop type single layer and dry-development process for EUV lithography

    Prediction of resolution using wet-develop type single layer and dry-development process for EUV lithography by Mori, Shigeyasu, Shirayone, Shigeru, Irie, Shigeo, Matsuzawa, Nobuyuki, Oizumi, Hiroaki, Yano, Ei, Okazaki, Shinji, Miyafuji, Atsushi, Watanabe, Takeo, Kinoshita, Hiroo, Oshio, Tetsuya, Sugisaki, Katsumi

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