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Search Results - Shive, S.F.
Search Results - Shive, S.F.
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Synthesis and characterization of high quality ultrathin gate oxides for VLSI/ULSI circuits
by
Roy, P.K.
,
Diklan, R.H.
,
Martin, E.P.
,
Shive, S.F.
,
Sinha, A.K.
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Enabling shallow trench isolation for 0.1 /spl mu/m technologies and beyond
by
Chang, C.-P.
,
Shive, S.F.
,
Kuehne, S.C.
,
Ma, Y.
,
Vuong, H.
,
Baumann, F.H.
,
Bude, M.
,
Lloyd, E.J.
,
Pai, C.S.
,
Abdelgadir, M.A.
,
Dail, R.
,
Liu, C.T.
,
Cheung, K.P.
,
Colonell, J.I.
,
Lai, W.Y.C.
,
Miner, J.F.
,
Vaidya, H.
,
Liu, R.C.
,
Clemens, J.T.
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A very high performance and manufacturable 3.3 V 0.35-/spl mu/m CMOS technology for ASICs
by
Kizilyalli, I.C.
,
Lytle, S.A.
,
Jones, B.R.
,
Martin, E.P.
,
Shive, S.F.
,
Brooks, A.L.
,
Thoma, M.J.
,
Schanzer, R.W.
,
Sniegowski, J.W.
,
Wroge, D.M.
,
Key, R.W.
,
Kearney, J.W.
,
Stiles, K.R.
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Cmos Technology
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Implants
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Manufacturing
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Oxidation
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Silicon
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Annealing
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Application Specific Integrated Circuits
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Chemical Vapor Deposition
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Circuit Synthesis
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Cmos Process
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Delay Effects
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Dielectrics
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Doping Profiles
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Etching
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Fabrication
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Isolation Technology
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Mos Devices
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Mosfets
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Plasma Applications
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Plasma Temperature
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Ieee Electronic Library (Iel) Conference Proceedings
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Ieee Xplore All Conference Series
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