e-beam metrology of thin resist for high NA EUVL by Lorusso, Gian Francesco, De Simone, Danilo, Zidan, Mohamed, Severi, Joren, Moussa, Alain, Dey, Bappaditya, Halder, Sandip, Goldenshtein, Alex, Houchens, Kevin, Santoro, Gaetano, Fischer, Daniel, Muellender, Angelika, Mack, Chris, Kondo, Tsuyoshi, Shohjoh, Tomoyasu, Ikota, Masami, Charley, Anne-Laure, De Gendt, Stefan, Leray, Philippe

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