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Piezoelectric characteristics of CMOS compatible AIN SAW resonators
by
Ralib, Aliza Aini Md
,
Pandian, Mohanraj Soundara
,
Ferrer, Eloi Marigo
,
Song, Charlie TayWee
,
Shunmugam, Muniandy
,
Zainuddin, Ahmad Anwar Bin
,
Nordin, Anis Nurashikin
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Aluminium Nitride
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Cmos
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Coupling Coefficient
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Decision Support Systems
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Iii-V Semiconductor Materials
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Piezoelectric
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Surface Acoustic Wave
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