Search Results - Sigarev, Andrey A

  • Showing 1 - 5 results of 5
Refine Results
  1. 1
    Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control

    Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control by Egorov, Konstantin V, Kuzmichev, Dmitry S, Sigarev, Andrey A, Myakota, Denis I, Zarubin, Sergey S, Chizov, Pavel S, Perevalov, Timofey V, Gritsenko, Vladimir A, Hwang, Cheol Seong, Markeev, Andrey M

    Get full text
    Article
    Save to List
    Saved in:
  2. 2
    Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency controlElectronic supplementary information (ESI) available. See DOI: 10.1039/c8tc00679b

    Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency controlElectronic supplementary information (ESI) available. See DOI... by Egorov, Konstantin V, Kuzmichev, Dmitry S, Sigarev, Andrey A, Myakota, Denis I, Zarubin, Sergey S, Chizov, Pavel S, Perevalov, Timofey V, Gritsenko, Vladimir A, Hwang, Cheol Seong, Markeev, Andrey M

    Get full text
    Article
    Save to List
    Saved in:
  3. 3
    Hydrogen radical enhanced atomic layer deposition of TaO x : saturation studies and methods for oxygen deficiency control

    Hydrogen radical enhanced atomic layer deposition of TaO x : saturation studies and methods for oxygen deficiency control by Egorov, Konstantin V., Kuzmichev, Dmitry S., Sigarev, Andrey A., Myakota, Denis I., Zarubin, Sergey S., Chizov, Pavel S., Perevalov, Timofey V., Gritsenko, Vladimir A., Hwang, Cheol Seong, Markeev, Andrey M.

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  4. 4
    Chitin and Cellulose Processing in Low-Temperature Electron Beam Plasma

    Chitin and Cellulose Processing in Low-Temperature Electron Beam Plasma by Vasilieva, Tatiana, Chuhchin, Dmitry, Lopatin, Sergey, Varlamov, Valery, Sigarev, Andrey, Vasiliev, Michael

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  5. 5
    Synthesis of bio-active titanium oxide coatings stimulated by electron-beam plasma

    Synthesis of bio-active titanium oxide coatings stimulated by electron-beam plasma by Vasilieva, Tatiana, Sokolov, Igor, Sigarev, Andrey, Tun Win, Aung

    Published in Open Chemistry
    Get full text
    Items that cite this one
    Article
    Save to List
    Saved in:

Search Tools: