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The effect of small-signal AC voltages on C– V characterization and parameter extraction of SiO 2 thin films
by
Zhang, Hongguo
,
Gurang, Pant
,
Sigh, Nihdi
,
Manuel, Quvdo
,
Wallace, Robert
,
Gnade, Bruce
,
Stokes, Kevin
Published in
Microelectronics and reliability
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The effect of small-signal AC voltages on C–V characterization and parameter extraction of SiO2 thin films
by
Zhang, Hongguo
,
Gurang, Pant
,
Sigh, Nihdi
,
Manuel, Quvdo
,
Wallace, Robert
,
Gnade, Bruce
,
Stokes, Kevin
Published in
Microelectronics and reliability
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