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Optimizing Middle of Line (MoL) Contact Cleaning to Preserve Tungsten (W) Integrity in Advanced Technology Nodes
by
Singh, SherJang
,
Muralidhar, Pranesh
,
Das, Kakoli
,
Scott, Silas
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ECS transactions
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Optimized salicide clean to reduce post fill defectivity
by
Singh, SherJang
,
Muralidhar, Pranesh
,
Jayaseelan, Sabarinath
,
Yue Hu
,
Scott, Silas
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Mask Cleaning in EUV and Nano-Imprint Lithography
by
Zhang, Yuan
,
Singh, Sherjang
,
Chen, Ssuwei
,
Dress, Peter
,
Dietze, Uwe
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SiC-C fiber electrode for biological sensing
by
Singh, Sherjang
,
Buchanan, Relva C.
Published in
Materials Science & Engineering C
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SiC-C fiber electrode for biological sensing
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Singh, Sherjang
,
Buchanan, Relva C
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Materials Science and Engineering C: Biomimetic Materials, Sensors and Systems
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Action Potential Recording
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Bevel Particles
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Bevels
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Carbon Microelectrodes
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Cleaning
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Cmp Defects
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