Search Results - Skilbred, David

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  1. 1
    450mm Cu single damascene BEOL process with 20nm half-pitched features

    450mm Cu single damascene BEOL process with 20nm half-pitched features by Sunoo Kim, Dunn, Shannon, Smith, Steven, Collision, WenLi, Prudhomme, Jamie, Huey-Ming Wang, Maniscalco, Joe, Yathapu, Nithin, Chulgi Song, Wang, Barry, Carr, Christopher, Hsi-Wen Liu, Gall, Bruce, Alaestante, Angelo, Min-Hui Chen, Conti, Richard, ChungJu Yang, Sullivan, Denis, Culafi, Kosta, Moon, BumKi, Yii-Cheng Lin, Yu-Lieh Fu, Sieg, Katherine, Larrea, Anne-Sophie, Fish, Norman, Swaine, Regina, Bialy, Alexander, Tallon, Milo, Stapf, Gerard, Hagwood, John, Bryant, Michael, Cottle, Rand, Chang, Stock, Kelling, Mark, Schaefer, Karsten, Franca, Dan, Pinyen Lin, Borst, Christopher, Kwangwook Lee, JongHeun Lim, Skilbred, David, Chien, Cc, Robertson, Frank, Fria, Erin

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  2. 2
    Opportunities and challenges of the 450mm transition

    Opportunities and challenges of the 450mm transition by Lin, John, Pinyen Lin, Wen-Yu Ku, Kelling, Mark C., Akiki, Greg, Sangdong Kwon, Kwangwook Lee, Collison, Wenli, Chang, Stock, Cottle, Rand, Yu-Chih Wang, Borst, Christopher, Skilbred, David, Robertson, Frank, Farrar, Paul

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  3. 3
    Effect of metal contaminants in pre-gate oxide cleans for sub-100-nm devices

    Effect of metal contaminants in pre-gate oxide cleans for sub-100-nm devices by Pathangey, B., McCarthy, L.D., Skilbred, D.C.

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