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Nanoscale morphology tailoring in plasma deposited CN x layers
by
Vasin, Andrii
,
Slobodian, Olexander
,
Rusavsky, Andrii
,
Gudymenko, Olexander
,
Lytvyn, Petro
,
Tiagulskyi, Stanislav
,
Yatskiv, Roman
,
Grym, Jan
,
Bortchagovsky, Eugene
,
Dzhagan, Volodymyr
,
Zahn, Dietrich
,
Nazarov, Alexei
Published in
Journal of physics. D, Applied physics
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Journal Of Physics. D, Applied Physics
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Nanoscale Morphological Shaping
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Physical Sciences
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Physics
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Physics, Applied
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Plasma Deposition
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Science & Technology
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Thin Layers
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Institute Of Physics:jisc Collections:iop Publishing Journal Archive 1874-1998 (Access Period 2020 To 2024)
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Institute Of Physics
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Institute Of Physics Iopscience Extra
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