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Silicon micro-optical scanner
by
Asada, Norihiro
,
Takeuchi, Masaru
,
Vaganov, Vladimir
,
Belov, Nickolai
,
in't Hout, Sebastiaan
,
Sluchak, Igor
Published in
Sensors and actuators. A. Physical.
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Sensors And Actuators. A. Physical.
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Angular Amplitude
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Conventional Optical Microscopes
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Silicon Micro-Optical Scanner
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