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High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through
by
Burger, G.J
,
Smulders, E.J.T
,
Berenschot, J.W
,
Lammerink, T.S.J
,
Fluitman, J.H.J
,
Imai, S
Published in
Sensors and actuators. A. Physical.
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High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through
by
Burger, G.J.
,
Smulders, E.J.T.
,
Berenschot, J.W.
,
Lammerink, T.S.J.
,
Fluitman, J.H.J.
,
Imai, S.
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Sensors And Actuators. A. Physical.
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Micromachining
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Atomic Layer Deposition
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Atomic Measurements
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Contacting
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Engineering
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Engineering, Electrical & Electronic
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Feed-Throughs
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Feeds
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Instruments & Instrumentation
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Laboratories
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Mechanical Engineering
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Parasitic Capacitance
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Patterning
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Resists
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Scattering
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Science & Technology
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Shadow Masks
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Sciencedirect Freedom Collection 2022-2024
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Elsevier Sd Backfile Physical And Analytical Chemistry
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