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A monolithically integrated torsional CMOS-MEMS relay
by
Riverola, M
,
Sobreviela, G
,
Torres, F
,
Uranga, A
,
Barniol, N
Published in
Journal of micromechanics and microengineering
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Noise effects on resonator bias polarization in CMOS-MEMS oscillators
by
Sobreviela, G.
,
Riverola, M.
,
Uranga, A.
,
Barniol, N.
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