Search Results - Soemers, H M J R

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  1. 1
    Sensor fusion for active vibration isolation in precision equipment

    Sensor fusion for active vibration isolation in precision equipment by Tjepkema, D., van Dijk, J., Soemers, H.M.J.R.

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  2. 2
    A single-mask thermal displacement sensor in MEMS

    A single-mask thermal displacement sensor in MEMS by Krijnen, B, Hogervorst, R P, van Dijk, J W, Engelen, J B C, Woldering, L A, Brouwer, D M, Abelmann, L, Soemers, H M J R

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  3. 3
    Design and modeling of a six DOFs MEMS-based precision manipulator

    Design and modeling of a six DOFs MEMS-based precision manipulator by Brouwer, D.M., de Jong, B.R., Soemers, H.M.J.R.

    Published in Precision engineering
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  4. 4
    MEMS-based clamp with a passive hold function for precision position retaining of micro manipulators

    MEMS-based clamp with a passive hold function for precision position retaining of micro manipulators by Brouwer, D M, de Jong, B R, de Boer, M J, Jansen, H V, van Dijk, J, Krijnen, G J M, Soemers, H M J R

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  5. 5
    Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

    Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application by Brouwer, D M, de Jong, B R, Soemers, H M J R, Van Dijk, J

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