Search Results - Sovarong Leang

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  1. 1
    A control system for photolithographic sequences

    A control system for photolithographic sequences by Sovarong Leang, Shang-Yi Ma, Thomson, J., Bombay, B.J., Spanos, C.J.

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  2. 2
    A general equipment diagnostic system and its application on photolithographic sequences

    A general equipment diagnostic system and its application on photolithographic sequences by Leang, S., Spanos, C.J.

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  3. 3
    A novel in-line automated metrology for photolithography

    A novel in-line automated metrology for photolithography by Leang, S., Spanos, C.J.

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  4. 4
    A lithography workcell monitoring and modeling scheme

    A lithography workcell monitoring and modeling scheme by Ling, Zhi-min, Leang, Sovarong, Spanos, Costas J.

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  5. 5
    Application of feed-forward and feedback control to a photolithography sequence

    Application of feed-forward and feedback control to a photolithography sequence by Leang, S., Spanos, C.J.

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  6. 6
    Application of feed-forward control to a lithography stepper

    Application of feed-forward control to a lithography stepper by Leang, S., Spanos, C.J.

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  7. 7
    A Control & Diagnosis Scheme for Semiconductor Manufacturing

    A Control & Diagnosis Scheme for Semiconductor Manufacturing by Spanos, Costas J., Leang, Sovarong, Lee, Sherry

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