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    (Invited) Defect Generation in Device Processing and Impact on the Electrical Performances

    (Invited) Defect Generation in Device Processing and Impact on the Electrical Performances by Polignano, Maria Luisa, Mica, Isabella, Carnevale, Gianpietro P., Mauri, Aurelio, Bonera, Emiliano, Speranza, Serenella

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