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Search Results - Spesivtsev, Evgeni V.
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Features of oxide layer formation in high-aspect slot structures by means of MOCVD
by
Shevtsov, Yuri V.
,
Kuchumov, Boris М.
,
Kruchinin, Vladimir N.
,
Spesivtsev, Evgeni V.
,
Golovnev, Igor F.
,
Igumenov, Igor К.
Published in
Journal of crystal growth
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Effect of Spatial Image Transfer in a Pulse МОCVD Process
by
Shevtsov, Yuri V.
,
Kuchumov, Boris М.
,
Kruchinin, Vladimir N.
,
Spesivtsev, Evgeni V.
,
Golovnev, Igor F.
,
Igumenov, Igor К.
Published in
Physics procedia
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Journal Title
Journal Of Crystal Growth
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Physics Procedia
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Subjects
A1. Computer Simulations
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A3. Pulse Mocvd
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Aspect Ratio
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B1. Hfo
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1
B1. Hfo2 Nanolayer
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B1. Mgo Nanolayer
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B3. High-Aspect Slot Structures
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Chromium
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Crystallography
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Deposition
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Glass
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Hafnium Oxide
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Hfo2
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Layer Deposition
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Materials Science
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Materials Science, Multidisciplinary
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Mathematical Models
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Mgo
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Nanolayer
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Oxides
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Sciencedirect Journals
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Elsevier
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Free Full-Text Journals In Chemistry
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Road: Directory Of Open Access Scholarly Resources
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Ezb Electronic Journals Library
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Backfile Package - Materials Science [Yms]
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Backfile Package - Physics General (Legacy) [Ypa]
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