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Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration
by
Frühauf, Joachim
,
Gärtner, Eva
,
Li, Zhi
,
Doering, Lutz
,
Spichtinger, Jan
,
Ehret, Gerd
Published in
Sensors (Basel, Switzerland)
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Absolute distance interferometry for subaperture stitching of large freeform optics
by
Spichtinger, Jan
,
Schulz, Michael
,
Ehret, Gerd
Published in
EPJ Web of conferences
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Traceable stitching interferometry for form measurement of moderately curved freeform surfaces
by
Spichtinger, Jan
,
Schulz, Michael
,
Ehret, Gerd
,
Tutsch, Rainer
Published in
Optical engineering
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Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration
by
Fruhauf, Joachim
,
Gartner, Eva
,
Li, Zhi
,
Doering, Lutz
,
Spichtinger, Jan
,
Ehret, Gerd
Published in
Sensors
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