Search Results - Spigarollo, Danielle C. F. S.

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    Less Energetic Routes for the Production of SiOx Films from Tris(dimethylamino)silane by Plasma Enhanced Atomic Layer Deposition

    Less Energetic Routes for the Production of SiOx Films from Tris(dimethylamino)silane by Plasma Enhanced Atomic Layer Deposition by Spigarollo, Danielle C. F. S., Getnet, Tsegaye Gashaw, Rangel, Rita C. C., Silva, Tiago F., Cruz, Nilson C., Rangel, Elidiane Cipriano

    Published in Coatings (Basel)
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    Less Energetic Routes for the Production of SiOx Films from Trissilane by Plasma Enhanced Atomic Layer Deposition

    Less Energetic Routes for the Production of SiOx Films from Trissilane by Plasma Enhanced Atomic Layer Deposition by Spigarollo, Danielle C. F. S, Getnet, Tsegaye Gashaw, Rangel, Rita C. C, Silva, Tiago F, Cruz, Nilson C, Rangel, Elidiane Cipriano

    Published in Coatings (Basel)
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