Detection and titration of ozone using metallophthalocyanine based field effect transistors by Bouvet, M, Leroy, A, Simon, J, Tournilhac, F, Guillaud, G, Lessnick, P, Maillard, A, Spirkovitch, S, Debliquy, M, de Haan, A, Decroly, A

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A new technique for the fabrication of thin silicon radiation detectors by Foulon, F., Rousseau, L., Babadjian, L., Spirkovitch, S., Brambilla, A., Bergonzo, P.

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A new condenser microphone with a p + silicon membrane by Bourouina, T., Spirkovitch, S., Baillieu, F., Vauge, C.

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Phthalocyanine-based field-effect transistor as ozone sensor by Bouvet, Marcel, Guillaud, Gérard, Leroy, Arnaud, Maillard, André, Spirkovitch, Serge, Tournilhac, François-Genès

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Preliminary results on a silicon gyrometer based on acoustic mode coupling in small cavities by Bourouina, T., Exertier, A., Spirkovitch, S., Chaumet, B., Pleska, E.

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Integrated magnetic field sensor by Donzier, E., Lefort, O., Spirkovitch, S., Baillieu, F.

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Silicon etching techniques and application to mechanical devices by Bourouina, T., Spirkovitch, S., Marty, F., Baillieu, F., Donzier, E.

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Finite-element analysis of rotor stability in an axial-drive micromotor by Milne, N G, Beerschwinger, U, Yang, S J, Reuben, R L, Mathieson, D, Ziad, H, Spirkovitch, S

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Silicon Bulk Machining of Electrostatic Micromotors Fabrication and Potential Applications by Ziad, H., Bounhir, A., Spirkovitch, S., Baillieu, F., Bourouina, T., Marty, L., Rigo, S., L'hoir, A.

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Bias dependent etching of polysilicon mixed monocrystalline-polycrystalline silicon structures by Riou, J.C., Spirkovitch, S., Sangouard, P., Baillieu, B.

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A CMOS, self-biased charge amplifier by Amendola, G., Blanchard, Y., Exertier, A., Spirkovitch, S., Lu, G., Alquie, G.

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A new technique for the fabrication of thin silicon radiation detectors by Foulon, F., Rousseau, L., Babadjian, L., Spirkovitch, S., Brambilla, A., Bergonzo, P.

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BioMEA™: A versatile high-density 3D microelectrode array system using integrated electronics by Charvet, Guillaume, Rousseau, Lionel, Billoint, Olivier, Gharbi, Sadok, Rostaing, Jean-Pierre, Joucla, Sébastien, Trevisiol, Michel, Bourgerette, Alain, Chauvet, Philippe, Moulin, Céline, Goy, François, Mercier, Bruno, Colin, Mikael, Spirkovitch, Serge, Fanet, Hervé, Meyrand, Pierre, Guillemaud, Régis, Yvert, Blaise

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