Search Results - Sramek, Rurh

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    Nanoparticle reduction in Cu CMP for 20nm node and beyond

    Nanoparticle reduction in Cu CMP for 20nm node and beyond by Jeanjean, Damien, Robin, Olivier, Sramek, Rurh, Mermoz, Sebastien, Ducotey, Gregoire, Gaillard, Sebastien, Yufei Chen, Pitard, Frederic, Nicoud, Laurent, Brown, Brian

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    Conference Proceeding
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