Search Results - Standaert, Theodorus E.F.M

  • Showing 1 - 1 results of 1
Refine Results
  1. 1
    Pattern transfer into low dielectric constant materials by high-density plasma etching

    Pattern transfer into low dielectric constant materials by high-density plasma etching by Oehrlein, Gottlieb S, Standaert, Theodorus E.F.M, Matsuo, Peter J

    Published in Solid state technology
    Get full text
    Magazinearticle
    Save to List
    Saved in:

Search Tools: