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Combination of LOCOS and BOX Isolation for Submicron CMOS Technology
by
Zeller, Ch
,
Stelz, F.X.
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Lithography for patterning trench contacts
by
Gutmann, A.
,
Czech, G.
,
Stelz, F.X.
,
Küsters, K.-H.
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Microelectronic engineering
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Stacked Capacitor in Trench Cell for 16M-DRAM
by
Kusters, K.H.
,
DoThanh, L.
,
Stelz, F.X.
,
Kellner, W.-U.
,
Muhlhoff, H.M.
,
Muller, W.
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Conference Proceeding
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