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Oxygen-Related Thermal Donor Formation in Dopant-Rich Compensated Czochralski Silicon
by
Tanay, Florent
,
Dubois, Sebastien
,
Veirman, Jordi
,
Enjalbert, Nicolas
,
Stendera, Julie
,
Perichaud, Isabelle
Published in
IEEE transactions on electron devices
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Ieee Transactions On Electron Devices
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Annealing
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Compensation
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