Search Results - Sugino, Rinji

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  1. 1
    The formation, imaging, and application of thin silicon-dioxide membrane

    The formation, imaging, and application of thin silicon-dioxide membrane by Sugino, Rinji, Ito, Takashi

    Published in Electrochimica acta
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  2. 2
    Identification of MOS Gate Dielectric Breakdown Spot Using High Selectivity Cl Radical Etching Technique

    Identification of MOS Gate Dielectric Breakdown Spot Using High Selectivity Cl Radical Etching Technique by Sugino, Rinji, Nakanishi, Toshiro, Takasaki, Kanetake, Ito, Takashi

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  3. 3
    Ultraviolet excited Cl-radical etching of Si through native oxides

    Ultraviolet excited Cl-radical etching of Si through native oxides by Sugino, Rinji, Nara, Yasuo, Horie, Hiroshi, Ito, Takashi

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  4. 4
    Removal of Fe contaminants in SiO2 layers with successive processing of poly-Si deposition and Cl-radical etching

    Removal of Fe contaminants in SiO2 layers with successive processing of poly-Si deposition and Cl-radical etching by SUGINO, R, TADA, Y, ITO, T, OKUI, Y, SAKUMA, J

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  5. 5
    Dry cleaning for Fe contaminants on Si and SiO2 surfaces with silicon chlorides

    Dry cleaning for Fe contaminants on Si and SiO2 surfaces with silicon chlorides by SUGINO, R, OKUI, Y, SHIGENO, M, OHKUBO, S, TAKASAKI, K, ITO, T

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  6. 6
    A Formation of Si Native Oxide Membrane Using High-Selectivity Etching and Applications for Nano-Pipe Array and Micro-Diaphragm on Si Substrate

    A Formation of Si Native Oxide Membrane Using High-Selectivity Etching and Applications for Nano-Pipe Array and Micro-Diaphragm on Si Substrate by Sugino, R., Ito, T.

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