Search Results - Sung, Doug-Yong

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  1. 1
    Method for improving dry etching end point detection based on change in time accumulation correlation of plasma emitting wavelengths

    Method for improving dry etching end point detection based on change in time accumulation correlation of plasma emitting wavelengths by Oh, Se-Jin, Son, Chang-Gil, Sohn, Min-kyu, Sung, Doug-Yong, Kim, Min-Sung, Im, Ji-Soo, Nam, Sang Ki

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  2. 2
    Synthetic molecular spectra modeling for determining rotational, vibrational, and excitation temperatures of low-pressure nitrogen plasma

    Synthetic molecular spectra modeling for determining rotational, vibrational, and excitation temperatures of low-pressure nitrogen plasma by Han, Jonggu, Park, Woojin, Kim, Jongsik, Lim, Keon-Hee, Lee, Gwang-Ho, In, Seongjin, Park, Jitae, Oh, Se-Jin, Nam, Sang Ki, Sung, Doug-Yong, Moon, Se Youn

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  3. 3
    Improving detection of plasma etching end point using light compensation on optical emission spectra

    Improving detection of plasma etching end point using light compensation on optical emission spectra by Oh, Se-Jin, Sung, Doug-Yong, Ko, Jung-Min, Nam, Sang Ki

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