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    Comparison of the structural and optic al properties of amorphous silicon thin films prepared by direct current, bipolar pulse, and high-power impulse magnetron sputtering methods

    Comparison of the structural and optic al properties of amorphous silicon thin films prepared by direct current, bipolar pulse, and high-power impulse magnetron sputtering methods by Lakhonchai, Anthika, Chingsungnoen, Artit, Poolcharuansin, Phitsanu, Pasaja, Nitisak, Bunnak, Phuwanai, Suwanno, Mongkhol

    Published in Thin solid films
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