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MEMS 3-D Scan Mirror With SU-8 Membrane and Flexures for High NA Microscopy
by
Liu, Tianbo
,
Svidunovich, Aaron J.
,
Wollant, Benjamin C.
,
Dickensheets, David L.
Published in
Journal of microelectromechanical systems
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MEMS 3D Scan Mirror with SU-8 Membrane and Flexures for High NA Microscopy
by
Liu, Tianbo
,
Svidunovich, Aaron J
,
Wollant, Benjamin C
,
Dickensheets, David L
Published in
Journal of microelectromechanical systems
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Article
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Journal Of Microelectromechanical Systems
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Biaxial Gimbal
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Cancer Detection
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Deformation
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Engineering
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Fasteners
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Formability
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Mechanical Systems
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Mems 3-Dimensional Scanner
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Microelectromechanical Systems
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