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Deep-UVsensors based on SAW oscillators using low-temperature-grown AlN films on sapphires
by
Laksana, Chipta P.
,
Chen, Meei-ru
,
Liang, Yen
,
Tzou, An-jyeg
,
Kao, Hui-ling
,
Jeng, Erik S.
,
Chen, Jyh Shin
,
Chen, Hou-guang
,
Jian, Sheng-rui
Published in
IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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Deep-UV Sensors Based on SAW Oscillators Using Low-Temperature-Grown AlN Films on Sapphires
by
LAKSANA, Chipta P
,
CHEN, Meei-Ru
,
YEN LIANG
,
TZOU, An-Jyeg
,
KAO, Hui-Ling
,
JENG, Erik S
,
SHIN CHEN, Jyh
,
CHEN, Hou-Guang
,
JIAN, Sheng-Rui
Published in
IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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Ieee Transactions On Ultrasonics, Ferroelectrics, And Frequency Control
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Acoustic Wave Devices, Piezoelectric And Piezoresistive Devices
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Acoustic Waves
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Acoustics
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Aluminum Nitride
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Applied Sciences
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Deposition
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Devices
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Electronics
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Engineering
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Engineering, Electrical & Electronic
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Epitaxial Growth
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Exact Sciences And Technology
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Fundamental Areas Of Phenomenology
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Oscillators
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Physics
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Remote Sensors
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Sapphire
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Science & Technology
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Semiconductor Electronics. Microelectronics. Optoelectronics. Solid State Devices
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Sputtering
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Ieee Xplore (Online Service)
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Ieee Xplore
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