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Oxygen flow rate effect on copper oxide thin films deposited by radio frequency magnetron sputtering
by
Tadjine, Rabah
,
Houimi, Amina
,
Alim, Mohamed Mounes
,
Oudini, Noureddine
Published in
Thin solid films
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The erosion groove effects on RF planar magnetron sputtering
by
Tadjine, Rabah
,
Alim, Mounes M.
,
Kechouane, Mohamed
Published in
Surface & coatings technology
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Surface & Coatings Technology
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Thin Solid Films
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Materials Science
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Materials Science, Coatings & Films
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Physical Sciences
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Physics
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Physics, Applied
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Science & Technology
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Technology
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Thin Films
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Copper Oxides
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Deposition
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Effects
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Equivalence
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Erosion
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Impedance
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Ion Current Density
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Magnetron Sputtering
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Materials Science, Multidisciplinary
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Optical Emission Spectrometry
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Physics, Condensed Matter
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Plasma
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Sciencedirect Journals
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Backfile Package - Materials Science [Yms]
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Backfile Package - Physics General (Legacy) [Ypa]
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