Annealing reduces Si 3 N 4 microwave-frequency dielectric loss in superconducting resonators by Mittal, S., Adachi, K., Frattini, N.E., Urmey, M.D., Lin, S-X., Emser, A.L., Metzger, C., Talamo, L.G., Dickson, S., Carlson, D., Papp, S.B., Regal, C.A., Lehnert, K.W.

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