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Comparison of Silicon Surface Preparation Methods for Measurement of Minority Carrier Lifetime using the Microwave Photo-conductive Decay (μ-PCD) coupled with Continuous Corona Cha...
by
Pavelka, Tibor
,
Pap, Aron
,
Kenesei, Peter
,
Varga, Mariann
,
Novinics, F.
,
Tallian, Miklos
,
Borionetti, Gabriella
,
Guaglio, Gianluca
,
Pfeffer, Markus
,
Don, Eric R.
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ECS transactions
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Correlation Study of Bulk Si Stress and Lithography Defects Using Polarized Stress Imager
by
Janecska, Mate
,
Kovacs, Zsolt
,
Pongracz, Anita
,
Tallian, Miklos
Published in
IEEE transactions on device and materials reliability
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