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An integrated advanced process control on RTP gate oxide thickness and feed-forward implant compensation in mass production
by
Zhang Jian
,
Liu Shi Xiang
,
Lei Ming
,
Ling Syau Yun
,
Lim Ming Chou
,
Suresh, K.
,
Tan Miow Chin
,
Srinivasan, V.
,
Benyon, P.
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Efficient High Current Process Transfer and Device Matching Strategies for sub-90nm Manufacturing
by
Lee, Dennis
,
Loh, Nyensiong
,
Tan, Miow Chin
,
Shim, Kyuha
,
Falk, Scott
,
Guo, Baonian
,
Jillson, Scott
,
Wong, Bryan
,
Loh, Kherchong
,
Mehta, Sandeep
,
Erokhin, Yuri
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Conference Proceedings
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Science & Technology
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90Nm Cmos
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Advanced Process Control
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Device Matching
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Engineering
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Engineering, Electrical & Electronic
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1
Engineering, Manufacturing
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Feed-Forward Implant Compensation
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High Current
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Implants
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Logic Gates
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Mass Production
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Materials Science
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Materials Science, Multidisciplinary
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Physical Sciences
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Physics
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Physics, Applied
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Physics, Condensed Matter
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Plasma Temperature
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Process Control
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Ieee Electronic Library (Iel) Conference Proceedings
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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Ieee Xplore All Conference Series
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Aip Digital Archive
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American Institute Of Physics (Aip) Publications
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