Search Results - Tarkov, Sergey M.

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    Thermally Robust High‐Resistance Layers on Low‐Resistance Silicon Synthesized by Molecular CO+ Ion Implantation

    Thermally Robust High‐Resistance Layers on Low‐Resistance Silicon Synthesized by Molecular CO+ Ion Implantation by Popov, Vladimir P., Tarkov, Sergey M., Tikhonenko, Fedor V., Antonov, Valentin A., Tyschenko, Ida E., Simakin, Sergey G., Rudenko, Konstantin V.

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