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Phase-shifting point diffraction interferometer
by
Medecki, H
,
Tejnil, E
,
Goldberg, K A
,
Bokor, J
Published in
Optics letters
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Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions
by
Attwood, D.T.
,
Naulleau, P.
,
Goldberg, K.A.
,
Tejnil, E.
,
Chang Chang
,
Beguiristain, R.
,
Batson, P.
,
Bokor, J.
,
Gullikson, E.M.
,
Koike, M.
,
Medecki, H.
,
Underwood, J.H.
Published in
IEEE journal of quantum electronics
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Phase effects owing to multilayer coatings in a two-mirror extreme-ultraviolet schwarzschild objective
by
Tejnil, E
,
Goldberg, K A
,
Bokor, J
Published in
Applied optics (2004)
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A Phase-Shifting Point Diffraction Interferometer
by
Medecki, H.
,
Tejnil, E.
,
Goldberg, K.A.
,
Bokor, J.
Published in
Optics letters
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Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions : Extreme Ultraviolet Lithography
by
ATTWOOD, D. T
,
NAULLEAU, P
,
MEDECKI, H
,
UNDERWOOD, J. H
,
GOLDBERG, K. A
,
TEJNIL, E
,
CHANG CHANG
,
BEGUIRISTAIN, R
,
BATSON, P
,
BOKOR, J
,
GULLIKSON, E. M
,
KOIKE, M
Published in
IEEE journal of quantum electronics
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Tunable Coherent Radiation in the Soft X-ray and Extreme Ultraviolet spectral regions
by
Attwood, D.T.
,
Batson, P.
,
Beguiristain, R.
,
Bokor, J.
,
Chang, C.
,
Goldberg, K.A.
,
Gullikson, Eric M.
,
Koike, Masato
,
Medecki, H.
,
Naulleau, P.
,
Tejnil, E.
,
Underwood, J.H.
Published in
IEEE journal of quantum electronics
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Interferometry using undulator sources (invited, abstract)
by
Beguiristain, R.
,
Goldberg, K. A.
,
Tejnil, E.
,
Bokor, J.
,
Medecki, H.
,
Attwood, D. T.
,
Jackson, K.
Published in
Review of scientific instruments
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Actinic detection of sub-100 nm defects on extreme ultraviolet lithography mask blanks
by
Jeong, Seongtae
,
Johnson, Lewis
,
Rekawa, Seno
,
Walton, Chris C.
,
Prisbrey, Shon T.
,
Tejnil, Edita
,
Underwood, James H.
,
Bokor, Jeffrey
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Properties Of Visible Light Emitting (Al/sub y/Ga(/sub 1-y))/sub 0.5/In/sub 0.5/P Multiple Quantum Well Lasers With Varying Quantum Well Al Compositions
by
Thornton, R.L.
,
Tejnil, E.
,
Mosby, W.J.
,
Bour, D.
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Conference Proceeding
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Ieee Journal Of Quantum Electronics
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Review Of Scientific Instruments
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Subjects
Extreme Ultraviolet Radiation
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5
Physical Sciences
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Science & Technology
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Advanced Light Source
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Instrumentation, Including Nuclear And Particle Detectors
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Optics
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Soft X Radiation
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Coherent Radiation
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Interferometers
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Interferometry
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Masking
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Optical Systems
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Particle Accelerators
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Physics, Applied
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Technology
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Advanced Light Source Als
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Science Citation Index Expanded (Web Of Science)
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Ieee Xplore (Online Service)
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Ieee Xplore All Journals
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Optica Publishing Group (Opg)
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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Aip 美国物理联合会期刊回溯(Nstl购买)
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American Institute Of Physics
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