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Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions
by
Attwood, D.T.
,
Naulleau, P.
,
Goldberg, K.A.
,
Tejnil, E.
,
Chang Chang
,
Beguiristain, R.
,
Batson, P.
,
Bokor, J.
,
Gullikson, E.M.
,
Koike, M.
,
Medecki, H.
,
Underwood, J.H.
Published in
IEEE journal of quantum electronics
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Phase effects owing to multilayer coatings in a two-mirror extreme-ultraviolet schwarzschild objective
by
Tejnil, E
,
Goldberg, K A
,
Bokor, J
Published in
Applied optics (2004)
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Pattern specific optical models
by
Tejnil, Edita
,
Adam, Konstantinos
,
Lam, Michael C.
,
Berger, Gabriel
Published in
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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Actinic detection of sub-100 nm defects on extreme ultraviolet lithography mask blanks
by
Jeong, Seongtae
,
Johnson, Lewis
,
Rekawa, Seno
,
Walton, Chris C.
,
Prisbrey, Shon T.
,
Tejnil, Edita
,
Underwood, James H.
,
Bokor, Jeffrey
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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