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Search Results - Tenner, Vasco T
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Impact of coherence length on the field of view in dark-field holographic microscopy for semiconductor metrology: theoretical and experimental comparisons
by
Messinis, Christos
,
Tenner, Vasco T
,
De Boer, Johannes F
,
Witte, Stefan
,
den Boef, Arie
Published in
Applied optics (2004)
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Lensless diffractive imaging with ultra-broadband table-top sources: from infrared to extreme-ultraviolet wavelengths
by
Witte, Stefan
,
Tenner, Vasco T
,
Noom, Daniel WE
,
Eikema, Kjeld SE
Published in
Light, science & applications
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Diffraction-based overlay metrology using angular-multiplexed acquisition of dark-field digital holograms
by
Messinis, Christos
,
van Schaijk, Theodorus T M
,
Pandey, Nitesh
,
Tenner, Vasco T
,
Witte, Stefan
,
de Boer, Johannes F
,
den Boef, Arie
Published in
Optics express
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Fourier transform holography with extended references using a coherent ultra-broadband light source
by
Tenner, Vasco T
,
Eikema, Kjeld S E
,
Witte, Stefan
Published in
Optics express
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Uncertainty Estimation and Design Optimization of 2D Diffraction-Based Overlay Metrology Targets
by
Röhrich, Ruslan
,
Oliveri, Giorgio
,
Kovaios, Stefanos
,
Tenner, Vasco T
,
den Boef, Arie J
,
Overvelde, Johannes T. B
,
Koenderink, A. Femius
Published in
ACS photonics
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Measurement of the Phase and Intensity Profile of Surface Plasmon Laser Emission
by
Tenner, Vasco T
,
de Dood, Michiel J. A
,
van Exter, Martin P
Published in
ACS photonics
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Ultra-broadband extreme-ultraviolet lensless imaging of extended complex structures
by
Witte, Stefan
,
Tenner, Vasco T
,
Noom, Daniël W E
,
Eikema, Kjeld S E
Published in
arXiv.org
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