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Via resistance increase accelerated by thermal stress
by
Qin, Wentao
,
Donaldson, Scott
,
Rogers, Dan
,
Belisle, Chuck
,
Grivna, Gordy
,
Boukhanfra, Lahcen
,
Thiefain, Julien
,
Barrientos, Denise
,
Steinwall, Jim
,
Chang, George
,
Gambino, Jeff
,
Burgin, Rebecca
Published in
Microelectronics and reliability
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Microelectronics And Reliability
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Engineering
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Oxide
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Solid-State Reaction
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Spontaneous Reduction
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Thermal Stress
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Via Resistance
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