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Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
by
Wang, H.
,
Lin, J.
,
Huan, C.H.A.
,
Dong, P.
,
He, J.
,
Tang, S.H.
,
Eng, W.K.
,
Thong, T.L.J.
Published in
Applied surface science
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Applied Surface Science
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Carbon Nanotubes
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Chemical Vapor Deposition
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Cross-Disciplinary Physics: Materials Science; Rheology
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Methods Of Deposition Of Films And Coatings; Film Growth And Epitaxy
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Nanoscale Materials And Structures: Fabrication And Characterization
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