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Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine
by
Tibrewala, Arti
,
Hofmann, Norbert
,
Phataralaoha, Anurak
,
Jäger, Gerd
,
Büttgenbach, Stephanus
Published in
Sensors (Basel, Switzerland)
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Diamond-like carbon for MEMS
by
Peiner, Erwin
,
Tibrewala, Arti
,
Bandorf, Ralf
,
Lüthje, Holger
,
Doering, Lutz
,
Limmer, Wolfgang
Published in
Journal of micromechanics and microengineering
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Mechanical spectroscopy of thin polystyrene films
by
Haramina, Tatjana
,
Kirchheim, Reiner
,
Tibrewala, Arti
,
Peiner, Erwin
Published in
Polymer (Guilford)
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