A Self-Aligned Sacrificial Emitter Process for High Performance SiGe HBT in BiCMOS by Liu, Q.Z., Adkisson, James, Benoit, John, Camillo-Castillo, Renata, Chan, Kevin, Cheng, Peng, Ellis-Monaghan, John, Gabert, Tom, Gambino, Jeff, Gray, Peter, Hasselbach, Joe, Jain, Vibhor, Khater, Marwan, Leidy, Bob, Park, Dae-Gyu, Pekarik, Jack, Tiersch, Matt, Willets, Christa, Zetterlund, Bjorn K., Harame, D. L.

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