Search Results - Todorow, Valentin

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  1. 1
    Impact of Phase Shifted Coil Currents on Plasma Uniformity

    Impact of Phase Shifted Coil Currents on Plasma Uniformity by Agarwal, A., Banna, S., Todorow, V., Rauf, S., Collins, K.

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  2. 2
    Synchronous Pulse Plasma Operation upon Source and Bias Radio Frequencys for Inductively Coupled Plasma for Highly Reliable Gate Etching Technology

    Synchronous Pulse Plasma Operation upon Source and Bias Radio Frequencys for Inductively Coupled Plasma for Highly Reliable Gate Etching Technology by Tokashiki, Ken, Cho, Hong, Banna, Samer, Lee, Jeong-Yun, Shin, Kyoungsub, Todorow, Valentin, Kim, Woo-Seok, Bai, KeunHee, Joo, Sukho, Choe, Jeong-Dong, Ramaswamy, Kartik, Agarwal, Ankur, Rauf, Shahid, Collins, Ken, Choi, SangJun, Cho, Han, Kim, Hyun Joong, Lee, Changhun, Lymberopoulos, Dimitris, Yoon, Junho, Han, Woosung, Moon, Joo-Tae

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    Inductively Coupled Pulsed Plasmas in the Presence of Synchronous Pulsed Substrate Bias for Robust, Reliable, and Fine Conductor Etching

    Inductively Coupled Pulsed Plasmas in the Presence of Synchronous Pulsed Substrate Bias for Robust, Reliable, and Fine Conductor Etching by Banna, S., Agarwal, A., Tokashiki, K., Hong Cho, Rauf, S., Todorow, V., Ramaswamy, K., Collins, K., Stout, P., Jeong-Yun Lee, Junho Yoon, Kyoungsub Shin, Sang-Jun Choi, Han-Soo Cho, Hyun-Joong Kim, Changhun Lee, Lymberopoulos, D.

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  4. 4
    Inductively Coupled Pulsed Plasmas in the Presence of Synchronous Pulsed Substrate Bias for Robust, Reliable, and Fine Conductor Etching: Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing

    Inductively Coupled Pulsed Plasmas in the Presence of Synchronous Pulsed Substrate Bias for Robust, Reliable, and Fine Conductor Etching: Special Issue on Advances on Plasma Proces... by BANNA, Samer, AGARWAL, Ankur, JUNHO YOON, KYOUNGSUB SHIN, CHOI, Sang-Jun, CHO, Han-Soo, KIM, Hyun-Joong, CHANGHUN LEE, LYMBEROPOULOS, Dimitris, TOKASHIKI, Ken, HONG CHO, RAUF, Shahid, TODOROW, Valentin, RAMASWAMY, Kartik, COLLINS, Ken, STOUT, Phillip, LEE, Jeong-Yun

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