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Search Results - Tonotani, Junichi
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Behavior of incorporated nitrogen in plasma-nitrided silicon oxide formed by chemical vapor deposition
by
Shinoda, Nao
,
Itokawa, Hiroshi
,
Fujitsuka, Ryota
,
Sekine, Katsuyuki
,
Onoue, Seiji
,
Tonotani, Junichi
Published in
Japanese Journal of Applied Physics
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Measurement of Electron Density of Reactive Plasma Using a Plasma Oscillation Method
by
Kanoh, Masaaki
,
Tonotani, Junichi
,
Aoki, Katsuaki
,
Yamage, Masashi
Published in
Japanese Journal of Applied Physics
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Formation of Ammonium Salts and Their Effects on Controlling Pattern Geometry in the Reactive Ion Etching Process for Fabricating Aluminum Wiring and Polysilicon Gate
by
Saito, Shuichi
,
Sugita, Kazuyuki
,
Tonotani, Junichi
,
Yamage, Masashi
Published in
Japanese Journal of Applied Physics
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Crystallinity of Bamboo-Based Carbon Filaments for Incandescent Lamps Examined by Raman Spectroscopy as a Nondestructive Means of Analysis
by
Ohkawa, Hideki
,
Yuge, Yoji
,
Kamata, Hiroshi
,
Matsuda, Ryotaro
,
Ito, Yasuo
,
Miura, Akira
,
Tonotani, Junichi
Published in
Applied spectroscopy
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Effect of CHF 3 Addition on Reactive Ion Etching of Aluminum Using Inductively Coupled Plasma
by
Saito, Shuichi
,
Sugita, Kazuyuki
,
Tonotani, Junichi
Published in
Japanese Journal of Applied Physics
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4.1: Low-Temperature-Processed IGZO TFTs for Flexible AMOLED with Integrated Gate Driver Circuits
by
Miura, Kentaro
,
Ueda, Tomomasa
,
Nakano, Shintaro
,
Saito, Nobuyoshi
,
Hara, Yujiro
,
Sugi, Keiji
,
Sakano, Tatsunori
,
Yamaguchi, Hajime
,
Amemiya, Isao
,
Akimoto, Keiko
,
Kameoka, Hisashi
,
Tonotani, Junichi
Published in
SID International Symposium Digest of technical papers
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Dry Etching of Cr 2 O 3 /Cr Stacked Film during Resist Ashing by Oxygen Plasma
by
Tonotani, Junichi
,
Ohmi, Shun-ichiro
,
Iwai, Hiroshi
Published in
Japanese Journal of Applied Physics
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Annealing condition dependence of electrical characteristics for Dy2O3/Si(100) structures
by
TAGUCHI, Junichi
,
YAMAMOTO, Hiroyuki
,
TONOTANI, Junichi
,
OHMI, Shun-Ichiro
,
IWAI, Hiroshi
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Conference Proceeding
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Stability of High-k Thin Films in Moisture Ambience - The Effect of Dissolution Gas from Acryl Apparatus
by
Akama, S.
,
Kikuchi, A.
,
Tonotani, J.
,
Ohmi, S.-I.
,
Iwai, H.
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