Search Results - Toshikawa, Kiyohiko

  • Showing 1 - 6 results of 6
Refine Results
  1. 1
    Silicon Nitride Film Deposition by Photochemical Vapor Deposition Using an Argon Excimer Lamp

    Silicon Nitride Film Deposition by Photochemical Vapor Deposition Using an Argon Excimer Lamp by Maezono, Yoshinari, Toshikawa, Kiyohiko, Kurosawa, Kou, Amari, Kouichi, Ishimura, Sou, Katto, Masahito, Yokotani, Atsushi

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  2. 2
    Nitridation in Photon-Assisted Process Using Argon Excimer Lamp

    Nitridation in Photon-Assisted Process Using Argon Excimer Lamp by Toshikawa, Kiyohiko, Amari, Kouichi, Ishimura, Sou, Katto, Masahito, Yokotani, Atsushi, Kurosawa, Kou

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  3. 3
    Erratum: “Amorphous Silicon Film Deposition from SiH 4 by Chemical Vapor Deposition with Argon Excimer Lamp”

    Erratum: “Amorphous Silicon Film Deposition from SiH 4 by Chemical Vapor Deposition with Argon Excimer Lamp” by Toshikawa, Kiyohiko, Yokotani, Atsushi, Kurosawa, Kou

    Get full text
    Items that this one cites
    Article
    Save to List
    Saved in:
  4. 4
    Amorphous Silicon Film Deposition from SiH 4 by Chemical Vapor Deposition with Argon Excimer Lamp

    Amorphous Silicon Film Deposition from SiH 4 by Chemical Vapor Deposition with Argon Excimer Lamp by Toshikawa, Kiyohiko, Yokotani, Atsushi, Kurosawa, Kou

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  5. 5
    Analysis of the Photochemical Reaction on the Surface for Room Temperature Deposition of SiO 2 Thin Films by Photo-CVD using Vacuum Ultraviolet Light

    Analysis of the Photochemical Reaction on the Surface for Room Temperature Deposition of SiO 2 Thin Films by Photo-CVD using Vacuum Ultraviolet Light by Yokotani, Atsushi, Amari, Kouichi, Maezono, Yoshinari, Toshikawa, Kiyohiko, Kurosawa, Kou

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  6. 6
    Applications of OLEDs that use VUV-CVD films

    Applications of OLEDs that use VUV-CVD films by Toshikawa, Kiyohiko, Miyano, Junichi, Yokotani, Atsushi, Kurosawa, Kou, Matsumoto, Yoshiie

    Get full text
    Items that this one cites
    Article
    Save to List
    Saved in:

Search Tools: